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Ion Implantation, Thermal Oxidation and Atomic Layer Deposition
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Ion Implantation
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Implanting the Ions
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Solid State Diffusion
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Implanting the Ions
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Implanting the Ions
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An Ion Implanter
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An Ion Implanter
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An Ion Implanter
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In Implantation Energy Loss Mechanisms
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In Implantation Energy Loss Mechanisms
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In Implantation Energy Loss Mechanisms
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In Implantation Energy Loss Mechanisms
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SRIM demo
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TRIM demo
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In Implantation Energy Loss Mechanisms
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Channeling
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Channeling
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Crystal Damage
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Crystal Damage
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Crystal Damage
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Crystal Damage
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Crystal Damage
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Ion Implant Lab
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Ion Implant Lab
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Ion Implant Lab
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Ion Implantation Simulation Demo
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Ion Implant Lab
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Thermal Oxidation
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Definitions
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Uses of Oxides
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Uses of Oxides
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Uses of Oxides
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Uses of Oxides
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Uses of Oxides
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Uses of Oxides
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Oxide Structure
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Oxide Structure
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Oxide Growth Mechanisms
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Oxide Growth Mechanisms
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Oxide Growth Mechanisms
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Oxide Growth Mechanisms
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Oxide Growth Mechanisms
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Oxide Growth Simulation Demo
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Oxide Growth Mechanisms
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Oxide Growth Mechanisms
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Oxide Growth Mechanisms
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Oxide Growth Simulation Demo
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Oxide Growth Mechanisms
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Oxide Growth Mechanisms
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Oxide Growth Mechanisms
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Oxide Growth Mechanisms
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Thickness of the oxide
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Quantum Tunneling Simulation Demo
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MOSCap Demo
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Thickness of the oxide
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Thickness of the oxide
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Thickness of the oxide
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Thickness of the oxide
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Thickness of the oxide
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Thickness of the oxide
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Oxide non-idealities
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Oxide non-idealities
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Fundamentals
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Fundamentals
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ALD of Alumina
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ALD of Alumina
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ALD of Alumina
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ALD of Alumina
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ALD vs. Others
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ALD vs. Others
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ALD Lab
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ALD Lab
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ALD Lab
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ALD Lab
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ALD Lab
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Ellipsometer Simulation Demo
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ALD Lab
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ALD Lab
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ALD Lab
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ALD Demo
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1 ALD Capabilities at Penn State
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1 4 ALD, tools: 2 thermal & 2 plasma
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1 Thickness measurement and mapping
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1 ALD processes on Lesker LE
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107:15 Comparison between different systems
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1 Ellipsometer Demo
Description:
Explore a comprehensive seminar on advanced semiconductor fabrication techniques in this nearly two-hour presentation from the NACK - Nano-Educators Topical Seminar Series. Delve into the intricacies of ion implantation, thermal oxidation, and atomic layer deposition (ALD) with experts Atilla Ozgur Cakmak from Pennsylvania State University and Rich Hill from Erie Community College. Learn about ion implantation processes, energy loss mechanisms, and crystal damage, with demonstrations of SRIM and TRIM simulations. Examine thermal oxidation, including oxide growth mechanisms, structure, and applications, complemented by interactive simulations. Investigate ALD techniques, comparing them to other deposition methods and exploring real-world applications through lab demonstrations. Gain insights into ALD capabilities at Penn State, featuring various tools and processes. Enhance your understanding of these crucial nanotechnology fabrication methods through detailed explanations, simulations, and practical demonstrations. Read more

Ion Implantation, Thermal Oxidation, and Atomic Layer Deposition - Lecture 7

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#Engineering #Nanotechnology #Science #Physics #Quantum Mechanics #Quantum Tunneling
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Ion Implantation, Thermal Oxidation and Atomic Layer Deposition