Ion Implantation, Thermal Oxidation, and Atomic Layer Deposition - Lecture 7

Ion Implantation, Thermal Oxidation, and Atomic Layer Deposition - Lecture 7

Explore a comprehensive seminar on advanced semiconductor fabrication techniques in this nearly two-hour presentation from the NACK - Nano-Educators Topical Seminar Series. Delve into the intricacies of ion implantation, thermal oxidation, and atomic layer deposition (ALD) with experts Atilla Ozgur Cakmak from Pennsylvania State University and Rich Hill from Erie Community College. Learn about ion implantation processes, energy loss mechanisms, and crystal damage, with demonstrations of SRIM and TRIM simulations. Examine thermal oxidation, including oxide growth mechanisms, structure, and applications, complemented by interactive simulations. Investigate ALD techniques, comparing them to other deposition methods and exploring real-world applications through lab demonstrations. Gain insights into ALD capabilities at Penn State, featuring various tools and processes. Enhance your understanding of these crucial nanotechnology fabrication methods through detailed explanations, simulations, and practical demonstrations. Read more