Fabricating a MEMS Pressure Sensor - You Can Do This!
Save Big on Coursera Plus. 7,000+ courses at $160 off. Limited Time Only! Grab it Explore the process of fabricating a MEMS pressure sensor in this comprehensive 1-hour 21-minute conference talk from the NACK - Nano-Educators Topical Seminar Series. Learn about the importance of MEMS pressure sensors, their applications, and how they work. Follow a detailed step-by-step walkthrough of the fabrication process, including photolithography, wafer preparation, deposition, etching, and inspection techniques. Discover the intricacies of backside and frontside patterning, sputtering, liftoff processes, and chamber etching. Gain insights into the use of specialized equipment like the Karl Suss MA6/BA6 and profilometer. The presentation also covers singulation, dicing, and probing of the finished sensors. Additionally, learn about undergraduate research opportunities and the MNTESIG community for those interested in pursuing this field further.