Electron Beam Lithography - Drawing Images with Electrons

Electron Beam Lithography - Drawing Images with Electrons

Explore the fascinating world of Electron Beam Lithography in this 25-minute video. Learn about drawing images with electrons using a scanning electron microscope. Discover the intricacies of substrate selection, PMMA resist application, and the working principles of e-beam resists. Delve into the development process and analyze results, examining factors such as dose dependence, resist thickness, substrate properties, and accelerating voltage. Understand the proximity effect, emission current, and the differences between SEM and EBL. Investigate fast beam blankers and the distinction between positive and negative PMMA dosing. Conclude with insights on future steps and a glimpse at the Curiosity Rover Wheel design.