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Like driving a car: acquiring quality SEM/FESEM images in different situations
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About me
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Dalian
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Outline
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Springtail cuticles Sample curtesy: Lin Wang
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Etched Si mushroom structure Sample curtesy: Lin Wang
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Slide 7: Untitled
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Etched Si grating Sample curtesy: Fabin Grise
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WSe2/Graphene 0.2KV
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MoS2/0.2KV Sample curtsey: Kevin Lu
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3D printed nanostructure/2 kV Sample curtsey: Jiho Noh
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Charging effect
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Polystyrene latex coated with Au
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Untitled: Slide 14
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SE2 1KV/7.1mm
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Outline
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Key imaging parameters
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Working Distance WD Smaller WD, better resolution
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Working distance & detectors
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Choice of detectors
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Untitled: Slide 21
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Choice of beam voltage
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Electron and sample interaction
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Zeiss: Low-voltage SEM-beyond sample topography Dr. Iwona Jozwik
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Zeiss: Low-voltage SEM-beyond sample topography Dr. Iwona Jozwik
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WSe2/0.5 kV
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Block Copolymer Sample Curtesy: Karthik Arunagiri
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20% Ce on Al2O3 particle
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X-ray emission & EDS
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Device EDS Mapping
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Outline
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Merlin
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G500
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G500: Excellent resolution at low KV
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GEMINI I column G500
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GEMINI II column Merlin
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Ultra
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Outline
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A simplified ray diagram of SEM
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Scanning-move the beam!
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Magnification?
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Merlin: Large field of view
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Ideal beam?
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Electron beam is a probe, just like your pencil
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Tip size matters!
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Tip shape matters too!
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How does the beam shape affect SEM image?
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Ideal beam?
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How to achieve sharp beam on FESEM?
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- focus
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Which component control beam shape?
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- Stigmation/stigmatism
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Mechanism to correct stigmation Stigmators x/y
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Ray diagram of a stigmated lens
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under
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How to correct stigmation
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How to test when stigmation is corrected?
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- stigmation
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Why straight beam?
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What happens when aperture is off?
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How do you know when aperture is off?
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- x/y alignment
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5 controls needed to correct the beam
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Questions?
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The Nanofabrication Lab
Description:
Explore a comprehensive 52-minute webinar that simplifies the complex process of acquiring high-quality SEM/FESEM images by drawing analogies to everyday activities like driving a car. Learn about key imaging parameters, working distance, detector choices, beam voltage selection, and electron-sample interactions. Discover techniques for achieving sharp beams, correcting stigmation, and aligning apertures. Gain insights into various SEM/FESEM instruments and their capabilities, including the Merlin, G500, and Ultra models. Benefit from practical examples using diverse samples such as springtail cuticles, etched Si structures, and 2D materials. Enhance your understanding of SEM/FESEM imaging to improve your microscopy skills and obtain better results in different imaging situations.

Acquiring Quality SEM/FESEM Images in Different Situations - Like Driving a Car

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Like driving a car: acquiring quality SEM/FESEM images in different situations