Nano-Characterization and Nano-Fabrication using EB/IB tools
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Table of Contents
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Introduction to "Nano-World"
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Nano/Micro/Macro World
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Brief History of Characterization with Microscopes
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Nano-Characterization
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Nano-Fabrication
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Semiconductor History
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MOSFET Scaling
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Optical Lithography
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Optical Lithography
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DUV and EUV Lithography
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Photon-Based Lithography
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Photon-Based Lithography
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Lithography for Nano-Fabrication
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Lithography for Nano-Fabrication
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Electron Beam Lithography
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Inside an IBM Quantum Chip
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Photons and Electrons
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Electron Beam Lithography
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EBL Process
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EBL Post Processing Pattern Transfer
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COP/PMMA DL Lift-Off Process
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Resolution Pattern
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Resolution Test Results
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Resolution Test Results: Lift-Off
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EBL Post Processing Pattern Transfer
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Zep REI Etch Process
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Resolution Test Results: RIE Etch
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EBL in Research Environment
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EBL in Research Environment
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Nano-Fabrication in Research Environment
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Lithography for Nano-Fabrication
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FIB/SEM
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Electrons and Ga+ Ions
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In-Solid Interaction
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What can IB Do?
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Examples: Fabrication of Plasmonic Antennas
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EBL and IBL
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EBL and IBL
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Example 1: AFM Probe Modification
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Example 2: Metal Tip Modification
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Example 3: Cutting out a Slab with a Specific Crystallographic Orientation
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FIB FIB-FESEM
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FIB as Characterization Tool
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Demo
Description:
Explore nano-characterization and nano-fabrication techniques using electron beam (EB) and ion beam (IB) tools in this comprehensive lecture by Tomoko Borsa from the University of Colorado, Boulder. Delve into the nano-world, tracing the history of microscopy and semiconductor technology. Examine various lithography methods, including optical, electron beam, and focused ion beam lithography. Learn about the processes, applications, and limitations of these techniques in research environments. Discover practical examples of EB and IB applications, such as AFM probe modification, metal tip alteration, and precise sample preparation. Gain insights into the use of focused ion beam as both a fabrication and characterization tool, concluding with a demonstration of these cutting-edge technologies.
Nano-Characterization and Nano-Fabrication Using Electron Beam and Ion Beam Tools - Lecture 13