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Direct write laser lithography
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Some exposed photoresist
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Spatial filtering
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Focus detection unused
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Walking the beam
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Galvo scanner
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Scan/Tube lens
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Microscope Objective and substrate
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Optical Rlay Full Explanation
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2x Beam Expander
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Results Datak Er-71
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Results Microposit s1818
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Problems to fix
Description:
Explore DIY laser lithography techniques for micron-resolution fabrication in this 22-minute video. Learn about maskless photolithography using a direct write laser machine, a method similar to projection lithography for creating patterns in photoresist. Discover the advantages of maskless lithography for prototype work and one-off projects compared to traditional masked techniques. Delve into the various components of the setup, including spatial filtering, beam walking, galvo scanners, and microscope objectives. Examine results using different photoresists like Datak Er-71 and Microposit s1818. Gain insights into common challenges and potential improvements for this microfabrication process used in semiconductor, MEMS, and microfluidics applications.

DIY Laser Lithography - Micron Resolution

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