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Lecture - 1 Introduction to MEMS & Microsystems

Lecture - 2 Introduction to Microsensors

Lecture - 3 Evoluation of MEMS, Microsensors, Market Survey

Lecture - 4 Application of MEMS

Lecture - 5 MEMS Materials

Lecture - 6 MEMS Materials' Properties

Lecture - 7 MEMS Materials Properties (Contd.)

Lecture - 8 Microelectronic Technology for MEMS - II

Lecture - 9 Microelectronic Technology for MEMS - III

Lecture - 10 Micromachining Technology for MEMS

Lecture - 11 Micromachining Process

Lecture - 12 Etch Stop Techniques and Microstructure

Lecture - 13 Surface and Quartz Micromachining

Lecture - 14 Fabrication of Micromachined Microstructure

Lecture - 15 Microstereolithography

Lecture - 16 MEMS Microsensors Thermal

Lecture - 17 Micromachined Microsensors Mechanical

Lecture - 18 MEMS Pressure and Flow Sensor

Lecture - 19 Micromachined Flow Sensors

Lecture - 20 MEMS Inertial Sensors

Lecture - 21 Micromachined Microaccelerometers for MEMS

Lecture - 22 MEMS Accelerometers for Avionics

Lecture - 23 Temperature Drift and Damping Analysis

Lecture - 24 Piezoresistive Accelerometer Technology

Lecture - 25 MEMS Capacitive Accelerometer

Lecture - 26 MEMS Capacitive Accelerometer Process

Lecture - 27 MEMS Gyro Sensor

Lecture - 28 MEMS for Space Application

Lecture - 29 Polymer MEMS & Carbon Nano Tubes CNT

Lecture - 30 Wafer Bonding & Packaging of MEMS

Lecture - 31 Interface Electronics for MEMS

Lecture - 32 MEMS for Biomedical Applications (Bio-MEMS)

Description:

Instructor: Prof. Santiram Kal, Department of Electronics and Electrical Communication Engineering, IIT Kharagpur. This course covers lessons in micro sensors, MEMS materials and its properties, micro electronic and micromachining technology for MEMS, etch stop techniques, micro stereolithography, MEMS accelerometers and inertial sensors, interface electronics for MEMS and BIO-MEMS.

MEMS & Microsystems

NPTEL

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